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Electron Probe Micro Analyzer (EPMA)
In an EPMA, a micro-volume of a sample is subjected to interaction with a focused electron beam (typical energy = 5-30 keV) and the X-ray photons emitted by the various elemental species are collected, and analyzed by suitable crystal detectors. Since the wavelengths of the emitted X-rays are characteristic of the elements in the sample, the chemical composition can be easily determined.
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Model:SX 100 Manufacturer:CAMECA, France Resolution:6 nm in Secondary electron images Operating parameters: 0.2 to 30 kV accelerating voltage and 10-5 to 10-12 A beam current
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