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Plasma immersion ion implantation
It is an ion implantation process that modifies the surfaces using RF plasma for enhancing tribological properties. Samples with any shape and size can be processed by this technique. Oxygen, carbon and nitrogen ions have been implanted by PIII process on SS-304 and Ti alloys to enhance wear and hardness properties.
Specification
Base vacuum: 5.0 × 10-6 mbar
RF frequency: 13.56 MHz
Antenna: Inductive coupling
RF generator Power: 300 W
High voltage: 30 kV
Temperature: 850°C
