DEPOSITION OF TIALN COATINGS USING REACTIVE BIPOLAR PULSED DIRECT CURRENT...

Deposition of TiAlN coatings using reactive bipolar pulsed direct current...

 

Deposition of TiAlN coatings using reactive bipolar pulsed direct current unbalanced magnetron sputtering, H. C. Barshilia, K. Yogesh, K. S. Rajam, Vacuum, 83 (2008) 427-434, doi:10.1016/j.vacuum.2008.04.075

 

 

Last updated on : 31-08-2020 07:08:09pm