CHEMICAL VAPOUR INFILTRATION (CVI) REACTOR

CVI Reactor is used to carry out the CVI process, in which the gaseous precursors are transported to the interior of a heated porous preform, allowed them to react at low pressure (1-20 m.Bar) and high temperature (800-1400°C) and form the refractory solid matrix to density the preform to obtain tough Ceramic Matrix Composites (CMC). This facility is established in 2005 and acquired more than a decade of experience in operation and maintenance of the reactor facility.

CHEMICAL VAPOUR INFILTRATION (CVI) REACTOR1

Equipment Details

Key Features

Application Areas

CVI/CVD Reactor suitable for SiC, PyC, BN, B4C, Si₃N₄ and related materials
Top-loading reactor with a working zone 850 mm diameter by 960 mm high
All graphite, working zone is suitable for operation up to 1,400ºC at pressures between 1 and 300 mbar.
Substrates and components are carried on rotating platform

Working Zone : 850 mm diameter x 950 mm height
Temperature range: 800-1,400ºC
Pressure range : 2-300 m bar
Pressure measurement : Absolute pressure transducer
Feed gases : Ar, N₂, BCl₃, NH₃, CH₄
Feed liquids : CH₃SiCl₃
Flow control : Mass Flow Controllers