NANOLAYERED MULTILAYER COATINGS OF CRN/CRALN PREPARED BY REACTIVE DC MAGNETRON SPUTTERING

Nanolayered multilayer coatings of CrN/CrAlN prepared by reactive DC magnetron sputtering

Nanolayered multilayer coatings of CrN/CrAlN prepared by reactive DC magnetron sputtering, H. C. Barshilia, B. Deepthi, N. Selvakumar, Anjana Jain, K. S. Rajam, Applied Surface Science, 253 (2007) 5076-5083,  doi: 10.1016/j.apsusc.2006.11.021