NANOINDENTATION AND ATOMIC FORCE MICROSCOPY MEASUREMENTS ON REACTIVELY SPUTTERED TIN COATINGS

Nanoindentation and atomic force microscopy measurements on reactively sputtered TiN coatings

Nanoindentation and atomic force microscopy measurements on reactively sputtered TiN coatings, H. C. Barshilia, K.S. Rajam, Bulletin of Materials Science, 27 (2004) 35-41,  doi: http://www.ias.ac.in/article/fulltext/boms/027/01/0035-0041