GROWTH AND CHARACTERIZATION OF TIALN/CRALN SUPERLATTICES PREPARED BY REACTIVE...

Growth and characterization of TiAlN/CrAlN superlattices prepared by reactive...

Growth and characterization of TiAlN/CrAlN superlattices prepared by reactive direct current magnetron sputtering, H. C. Barshilia, B. Deepthi, K.S. Rajam, Kanwal Preet Bhatti, Sujeet Chaudhary, Journal of Vacuum Science and Technology, 27 (2009) 29,  doi: 10.1116/1.3013858