XPS STUDY OF SPUTTERED ALUMINA THIN FILMS

XPS study of sputtered alumina thin films

XPS study of sputtered alumina thin films, N. Reddy, P. Bera, V. R. Reddy, N. Sridhara, A. Dey, C. Anandan, A. K. Sharma, Ceramics International, 40, (2014) 11099-11107, doi:10.1016/j.ceramint.2014.03.133