GROWTH OF DIAMOND THIN FILMS BY MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION PROCESS

Growth of diamond thin films by microwave plasma chemical vapor deposition process

Growth of diamond thin films by microwave plasma chemical vapor deposition process, H.C. Barshilia, B.R. Mehta and V.D. Vankar, J. Mater. Res. 11 (1996) 1019-1024, doi: 10.1557/JMR.1996.0127