CONCENTRATION OF ATOMIC HYDROGEN IN THE GROUND STATE IN A CH4-H2 MICROWAVE PLASMA

Concentration of atomic hydrogen in the ground state in a CH4-H2 microwave plasma

Concentration of atomic hydrogen in the ground state in a CH4-H2 microwave plasma, H.C. Barshilia and V.D. Vankar, J. Appl. Phys. 80 (1996) 3694-3698, doi: 10.1063/1.363318